Standard: ASTM B 708-2001
Dimension: Φ(25-400)mm*(3-28)mm
Material: RO5200, RO5400, RO5252(Ta-2.5W), RO5255(Ta-10W)
Circular targets: Diameter 25mm up to 400mm x Thickness 3mm up to 28mm
Rectangular targets: Thickness 1mm up to 12.7mm x Width up to 600mm x Length up to 2000mm
Purity: >=99.95% or 99.99%
|
Grade |
3N, 3N5, 4N, with Ta 99.99%min |
|
Recrystallization |
95%min |
|
Grain size |
ASTM 4 or finer |
|
Surface finish |
16Rms max. or Ra 0.4 ( RMS64 or better) |
|
Flatness |
0.1mm or 0.15% max |
|
Tolerance |
+/-0.010" on all dimensions |
|
Chemistry ppm |
||||||||||||
|
Designation |
Chief component |
Impurities maxmium |
||||||||||
|
Ta |
Nb |
Fe |
Si |
Ni |
W |
Mo |
Ti |
O |
C |
H |
N |
|
|
Ta1 |
Remainder |
300 |
40 |
30 |
20 |
40 |
40 |
20 |
150 |
40 |
15 |
20 |
|
Ta2 |
Remainder |
800 |
100 |
100 |
50 |
200 |
200 |
50 |
200 |
100 |
15 |
100 |
|
TaNb3 |
Remainder |
＜35000 |
100 |
100 |
50 |
200 |
200 |
50 |
200 |
100 |
15 |
100 |
|
TaNb20 |
Remainder |
170000- 230000 |
100 |
100 |
50 |
200 |
200 |
50 |
200 |
100 |
15 |
100 |
|
Ta2.5W |
Remainder |
400 |
50 |
30 |
20 |
30000 |
60 |
20 |
150 |
50 |
15 |
60 |
|
Ta10W |
Remainder |
400 |
50 |
30 |
20 |
110000 |
60 |
20 |
150 |
50 |
15 |
60 |
Tantalum Material
Titanium Target
Nickel Target
Tungsten Target
Molybdenum Target
Niobium Target
Zirconium Target
